Rigaku-Cat.4562S351,Spec.C048-08-001D,Item NO.902598-Magnetic Seal, Cassette,ULTRAX

Condition: New
Part #: Cat.4562S351,Spec.C048-08-001D,Item NO.902598

$2,678.00

SKU: Cat.4562S351,Spec.C048-08-001D,Item NO.902598 Categories: ,
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Description

The Rigaku-Cat.4562S351 (Spec. C048-08-001D) is a high-performance magnetic fluid seal cassette specifically engineered for ULTRAX X-ray generator systems and high-vacuum rotary applications. As a critical component in advanced vacuum engineering, this magnetic seal provides a hermetic, non-contact interface that allows for high-speed rotational motion while maintaining the integrity of a high-vacuum (HV) or ultra-high-vacuum (UHV) environment.

By utilizing ferrofluidic technology, the Item No. 902598 eliminates the friction and wear associated with traditional mechanical seals, ensuring that sensitive processes—such as semiconductor fabrication and X-ray diffraction—remain free from particulate contamination and atmospheric leaks.


Core Technology: Ferrofluidic Hermetic Sealing

At the heart of the Rigaku 4562S351 is Magnetic Fluid Technology. This involves a stable colloidal suspension of sub-micron magnetic particles within a low-vapor-pressure carrier liquid. In the presence of a powerful magnetic circuit, this fluid forms a “liquid O-ring” around the rotating shaft. This non-contact barrier is physically held in place by magnetic forces, providing a leak-proof seal that does not degrade with high RPMs or thermal cycling.

Mechanism of Action

The Rigaku ULTRAX Magnetic Seal operates through a sophisticated magnetic circuit:

  1. Magnetic Flux Concentration: A series of permanent magnets and high-permeability pole pieces create a concentrated magnetic field across the gap between the stationary housing and the rotating shaft.

  2. Liquid Ring Formation: The magnetic fluid is trapped in these high-flux gaps, forming a series of liquid rings (stages) that can withstand a specific pressure differential.

  3. Hermetic Isolation: These rings create a physical barrier to gases and contaminants. Because the fluid is the only contact point, there is zero mechanical friction between the moving parts.

  4. Heat Dissipation: For high-speed or high-load operations, the cassette features optional water-cooling channels to maintain the viscosity and stability of the magnetic fluid.

Primary Applications

The Rigaku-Cat.4562S351 is a versatile solution for industries requiring precision rotation under vacuum:

  • X-ray Generation: Essential for ULTRAX rotating anode systems where high-speed rotation is required to dissipate heat during X-ray production.

  • Semiconductor Processing: Ideal for silicon ingot pulling (Czochralski process) and wafer handling in vacuum clusters.

  • Thin-Film Deposition: Used in PVD (Physical Vapor Deposition) and CVD (Chemical Vapor Deposition) equipment to drive substrate rotation.

  • Crystal Growth: Capable of supporting up to 400mm ingot pulling in the presence of strong external magnetic fields.

  • Nanotechnology: Supporting high-vacuum environments for electron microscopy and surface analysis.


Key Advantages

Feature Rigaku Magnetic Seal (4562S351) Traditional Mechanical Seals
Contact Type Non-contact (Fluid-based) Physical contact (Friction)
Service Life Extended (Years of operation) Limited (Months before wear)
Leak Rate Near-zero (<10⁻⁹ std.cc/sec) Higher risk as seal wears
Maintenance Minimal; no particulate shed High; requires frequent replacement
Operating Speed High RPM capability Moderate (Limited by heat/friction)

Maintenance and Installation Process

While magnetic seals are designed for low maintenance, ensuring longevity involves a standardized integration process:

  • Pre-Installation Inspection: Verify shaft alignment and vacuum flange cleanliness. The non-contact nature requires precise concentricity to maintain the magnetic gap.

  • Cooling Integration: For applications exceeding standard RPM thresholds, connect the integrated water-cooling lines to prevent thermal breakdown of the ferrofluid.

  • Vacuum Bake-out: The 4562S351 is compatible with standard vacuum bake-out procedures; however, the temperature must stay within the specified range for the magnetic fluid variant used.


Technical Specifications

Parameter Detail
Model Number Rigaku-Cat.4562S351
Specification No. Spec. C048-08-001D
Item Number 902598
Compatible Systems Rigaku ULTRAX X-ray Series
Seal Type Magnetic Fluid (Ferrofluidic)
Ingot Pulling Capacity Up to 400mm
Cooling Optional Water Cooling
Environment High Vacuum, Corrosive Gas Compatible

Frequently Asked Questions

What is the expected service life of the Rigaku 4562S351 Magnetic Seal?

Unlike mechanical seals that wear out due to friction, the Rigaku magnetic seal can operate for several years without intervention. The lifespan is primarily determined by the evaporation rate of the magnetic fluid, which is extremely low in this specialized ULTRAX model, especially when used with proper water cooling.

Can this magnetic seal be used in the presence of strong external magnets?

Yes. The 4562S351 is engineered to remain stable even in environments with strong external magnetic fields, such as those found in 400mm silicon ingot pulling applications. Its internal magnetic circuit is shielded to ensure the ferrofluid remains trapped within the sealing stages.

Does the magnetic fluid need to be “topped up” or replaced?

Under normal operating conditions, the fluid is held permanently by the magnetic field. However, after several years of high-vacuum exposure or extreme thermal stress, a factory refurbishment or fluid replenishment may be required to restore the seal’s full pressure-holding capacity and vacuum integrity.

How does this seal prevent particulate contamination in semiconductor tools?

Because there is no physical contact between the rotating shaft and the stationary pole pieces, there is no mechanical abrasion. Mechanical seals often “shed” particles as they wear, but the Rigaku magnetic seal provides a clean, non-shedding interface ideal for Class 1 cleanroom environments.

What happens if the water-cooling system fails during high RPM operation?

If the seal is rated for high RPM and the cooling fails, the magnetic fluid may overheat, leading to a temporary loss of viscosity and potential vacuum leakage. The ULTRAX system usually includes thermal interlocks to prevent damage to the seal cassette in such an event.

Is the Item No. 902598 compatible with corrosive process gases?

The Rigaku-Cat.4562S351 uses a chemically stable magnetic fluid designed to resist common process gases used in thin-film deposition. For highly aggressive environments, it is recommended to verify the specific carrier fluid compatibility with your process chemistry to ensure maximum seal durability.

Listing Terms & Conditions

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